DEVICE FOR CHEMICAL DEPOSITION OF COATINGS FROM VAPOR PHASE Russian patent published in 1995 - IPC

FIELD: equipment for application of inorganic coatings. SUBSTANCE: workpieces 36 are placed on support tracks 28 of removable frame 9 between pins 33. Limiters 34 and 35 keep workpieces 36 against axial shifting. Frame 9 with workpieces 36 is installed on backing holder 6 and fixed rigidly with catch 10. Then cover 4 is closed and chamber 1 is pumped out to preset pressure. Delivery of reagents proceeds concurrently with the movement of backing holder 6 which reciprocates jointly with removable frame 9. Design of the device permits combining the reciprocation of workpieces along chamber with rolling around their axes across the housing thus ensuring application of uniform coatings to the entire surface of cylindrical workpieces. EFFECT: higher quality and output in deposition of coatings on cylindrical articles. 2 cl, 5 dwg