GASEOUS-VAPOR DEPOSITION APPARATUS Russian patent published in 2002 - IPC

FIELD: mechanical engineering, geological exploration, oil and gas extraction. SUBSTANCE: apparatus for applying coats to surfaces of article has horizontal cylindrical reaction chamber, heater positioned inside reaction chamber and adapted for heating of article, shaft introduced into reaction chamber through end cover, substrate holder fixed to shaft, evaporator positioned in upper part of reaction chamber, adapted for supplying basic reactants and connected to dosing system, and branch pipe positioned in lower part of reaction chamber and adapted for discharge of reaction products. Branch pipe has nitrogen catch and condensate collector and is connected to vacuum evacuation system. Substrate holder with articles to be coated is driven for effecting rotation and progressive motion by means of drive. Hermetically sealed pockets in peripheral parts of reaction chamber are adapted for accommodation of electric heaters. Reaction chamber wall is lined from inside with reflectors and has water-cooled jacket on the outside thereof. Shaft has blind cavity adapted for receiving detachable holder. Substrate holder is formed as cylinder comprising four disks fixed on single bushing. Two inner disks are provided with axially aligned openings for receiving articles to be coated and two outer disks are formed from continuous restricting members. Evaporator has hermetically sealed vessel with double wall and is made in the form of flare, or longitudinal slot collector, or elbow pipe curved at predetermined angle. Shaft end inside reaction chamber is provided with telescopic reflector. Shaft drive is formed as sliding nut fixed in hinged casing. Shaft has disk retainer. Branch pipe has tube, inside which are positioned electric heater and vessel containing desorbent. Nitrogen catch is formed as shell-and-tube heat-exchanger. Servo-controlled pump is positioned between nitrogen catch and fore pump. EFFECT: improved quality of coats, increased efficiency in the use of basic reactants and power and wider operational capabilities. 5 cl, 10 dwg