FIELD: physics. SUBSTANCE: invention relates to gas-discharge sources of charged particles. Source includes cathode, intermediate electrode with hole uniaxial to cathode, anode, emission and accelerating multiaperture uniaxial electrodes. Wall of intermediate electrode facing cathode has additional hole uniaxially to which anode is placed on side of cathode. Anode and cathode are positioned in sealed cavities connected to intermediate electrode. There are several anodes uniformly arranged around cathode to increase uniformity of distribution of current over section of beam. EFFECT: enhanced efficiency of extraction and uniformity of distribution of density of current over section of beam. 1 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| CHARGED PARTICLES SOURCE | 1988 |
|
SU1568793A1 |
| ION SOURCE | 1990 |
|
RU1766201C |
| PLASMA ELECTRON SOURCE | 0 |
|
SU1048956A1 |
| SOURCE OF IONS OF GASES | 1988 |
|
SU1625254A3 |
| ION SOURCE | 0 |
|
SU854192A1 |
| SOURCE OF IONS | 1976 |
|
SU581741A3 |
| PLASMIC ELECTRON SOURCE | 0 |
|
SU791098A1 |
| SOURCE OF IONS OF VAPORS OF METALS | 1990 |
|
RU1745080C |
| CHARGED PARTICLES SOURCE | 1990 |
|
SU1734510A4 |
| PLASMA EMITTER OF IONS | 1993 |
|
RU2045102C1 |
