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2 013 467

(13)

C1

(51)

IPC

(21) (22)

Application

4919548/26, 1991-03-18

(22)

Actual filing date

1991-03-18

(45)

Published

1994-05-30

(72)

Inventor

Khobotova Eh.B.

(73)

Holder

Khobotova Ehlina Borisovna

METHOD OF PROCESSING WASTE COPPER-AMMONIUM SOLUTION FOR ETCHING COPPER Russian patent published in 1994 - IPC

Abstract RU 2013467 C1

FIELD: manufacturing microcircuit. SUBSTANCE: waste copperammonium solution is corrected with the help of ammonium chloride and ammonia. The process is carried out at stage having minimal etching rate, washing waters of stamped array additionally containing sodium chloride are used. Quantity of components are determined according to formulae given in specification. EFFECT: improves efficiency of the method. 2 dwg, 7 tbl

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RU 2 013 467 C1

Authors

Khobotova Eh.B.

Dates

1994-05-30—Published

1991-03-18—Filed

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