FIELD: microelectronics. SUBSTANCE: equipment for precipitation of layers from gaseous phase has reaction unit including quartz reactor with radiator, body with substrate holder reloading chamber incorporating reloading mechanism and sluice chamber with sealing cover, light housing, cooled screen mounted for movement. Cover of sluice chamber is provided with grippers for fixing of plates and is joined with reloading mechanism for movement through split in reaction unit. EFFECT: enhanced efficiency and simplified design. 3 cl, 4 dwg
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