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2 022 053

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C1

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IPC

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Application

4945792/21, 1991-03-14

(22)

Actual filing date

1991-03-14

(45)

Published

1994-10-30

(72)

Inventor

Ignatenko V.V.Antipov A.T.Grigor'Ev Ju.I.Mednikov B.A.Lavrenjuk S.L.Shuvalov V.A.Khalov G.G.

(73)

Holder

Golovnoe Konstruktorskoe Bjuro Nauchno-Proizvodstvennogo Ob"Edinenija Im.Akad.S.P.Koroleva

APPARATUS FOR ION-PLASMA CLEANING OF DIELECTRIC SURFACES Russian patent published in 1994 - IPC

Abstract RU 2022053 C1

FIELD: technical physics and space research. SUBSTANCE: apparatus has ion source, cathode-condenser, vessel with working stuff, working stuff feeding and consumption control system, discharge power source. Cathode- condenser is made in the form of metal surface of screen-funnel, mounted on butt surface of ion source. Vessel with working stuff has axial no-go canal with heater. System of consumption control is made as heater power regulator with discharge current bias. EFFECT: apparatus has improved operational specifications, high reliability and simplicity. 1 dwg

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RU 2 022 053 C1

Authors

Ignatenko V.V.

Antipov A.T.

Grigor'Ev Ju.I.

Mednikov B.A.

Lavrenjuk S.L.

Shuvalov V.A.

Khalov G.G.

Dates

1994-10-30—Published

1991-03-14—Filed

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