FIELD: measurement technology. SUBSTANCE: method involves the steps of: reducing the content of atomic component of a gas flow from plasma by changing position of deactivating substance (insertion) relative to a channel of arrival of gas from plasma and simultaneously determining the content of active particles in the flow obtained as a result of integral check of the flow made by isothermal semiconductor microcalorimetry as a function of the content of atomic component obtained as a result of selective check by hemiluminescent solid-state sensor and determining a flow of oscillatory excited hydrogen molecules from the result obtained in integral check on the decrease of the content of atoms up to zero. EFFECT: enhanced accuracy. 2 cl, 3 dwg
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