PROCESS OF ANALYSIS OF PHYSICAL AND/OR CHEMICAL PROPERTIES OF SURFACE LAYER OF SOLID BODY ( VARIANTS ) Russian patent published in 2004 - IPC

FIELD: measurement technology. SUBSTANCE: process includes attack on surface layer of solid body with radiation in the form of monatomic beam, and/or electron beam, and/or molecular beam, and/or ion beam, and/or photon beam, and/or their combination and subsequent decontamination of surface layer with recording of energy quanta emitted because of it. Attack is carried out by single radiation pulse and decontamination of surface layer of solid body is executed on termination of action on it with radiation with holding of solid body at constant temperature followed by heating. Spectrum of energy quanta emitted by surface layer of solid body is recorded in process of decontamination of surface layer. Second variant of process includes attack on surface layer of solid body with low-temperature plasma. EFFECT: increased accuracy of analysis. 3 cl, 22 dwg