METHOD OF GENERATION IN GAS ELECTRIC DISCHARGE LASER AND GAS ELECTRIC DISCHARGE LASER Russian patent published in 1995 - IPC

FIELD: laser equipment. SUBSTANCE: invention is realized on excimer, Ar-Xe other lasers. It enable commutation elements to be excluded from main power supply circuit, power for pre-ionization and formation of discharge to be reduced, electric strength to be increased, inductance of discharge chamber to be reduced, compact gas laser to be created and consequently energy and power of laser to be enhanced. In compliance with method laser medium is pumped through two interelectrode gaps connected in series having common electrode 13, quasi-stationary difference of potentials between main electrodes 8, 9 is formed, initial concentration of electrons mainly in one of gaps is multiplied, high-voltage pulse is sent to common electrode 13. Preliminary discharge is formed first in first gap 6 then sequentially in second gap 7 with change of potential across electrode 13 and intensity of electric field. exceeding 1.5 and more times the average one between electrodes 8, 9. Case 3 of discharge chamber is made of two spaces 20, each housing own gap 6 or 7. Two-polar main source 1, 2 with grounded midpoint 32 connected to electrode 13 through inductance 33 is directly connected to electrodes 8, 9. Capacitances 10, 11 of supplementary circuit 12 are connected to electrodes 13, 8, 9. One or two gas conduits 17 placed in symmetry close opposite streams 31 of gas in two spaces 20. EFFECT: enhanced energy and power of laser. 12 cl, 4 dwg