MICRO-PUMP Russian patent published in 1995 - IPC

FIELD: pump engineering. SUBSTANCE: one of the three plates of the pump is made of a material which can be treated by photolithography method. The first plate bears on two other plates which are glued to it for forming the second delivery chamber. The first of the check valves connects the delivery chamber with the pump inlet. The second valve of diaphragm type connects the delivery chamber with the pump outlet. The plate has piezoelectric element for periodic deforming a plate arranged under the chamber. The element is used for changing the volume of the chamber. The outlet of the pump is in communication with a space defined under the second valve and delivery valve. A passage for connecting the space with the delivery chamber is provided in the second valve. The valve can be open at suction. At delivery, under-valve space of the first valve is in communication with the under-valve space of the second valve of the delivery chamber through the passage for connecting it with the outlet through the open second valve. EFFECT: improved design. 9 cl, 13 dwg