PROCESS OF MANUFACTURE OF MULTIBEAM ELECTRON-OPTICAL SYSTEM Russian patent published in 1995 - IPC

Abstract RU 2031470 C1

FIELD: electronics. SUBSTANCE: slots are made with electroerosion method when making holes in modulator and controlling electrodes. Axes of slots match centers of holes. EFFECT: facilitated manufacture of electron-optical system. 6 dwg

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RU 2 031 470 C1

Authors

Kravchenko V.L.

Rumjantsev N.G.

Zybin Ju.G.

Dates

1995-03-20—Published

1991-06-28—Filed