INTERFERENTIAL SPHEROMETER Russian patent published in 1995 - IPC

Abstract RU 2037768 C1

FIELD: instrumentation. SUBSTANCE: interferential spherometer includes radiation source, collimator, first beam splitter, optical wedge with flat bearing surface, optical table for placement of checked part mounted for reciprocating motion in plane parallel to bearing surface and provided with instrumentation displacement converter arranged along ray path and first objective lens and first radiation receiver placed in series across output of first beam splitter along backward path of ray. In addition second beam splitter is located across output of first beam splitter in forward path of ray. Second objective lens and second radiation receiver are positioned across its output along backward path of rays. Inputs of signal processing unit which outputs are coupled to inputs of computer are connected to outputs of first and second radiation receivers. Optical table is mounted for additional axial rotation. Each of radiation receivers is made in the form of multielement light- sensitive matrix. Radiation source is manufactured monochromatic with different radiation waves set in manufactured monochromatic with different radiation waves set in sequence. EFFECT: high-precision testing of curvature radii of spherical surfaces. 1 dwg

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RU 2 037 768 C1

Authors

Gurov I.P.

Dates

1995-06-19Published

1992-06-17Filed