INTERFEROMETER FOR MEASUREMENT OF TRANSLATIONS OF TWO-COORDINATE TABLE Russian patent published in 1995 - IPC

FIELD: measurement technology. SUBSTANCE: interferometer for measurement of translations of two-coordinate table includes monochromatic light source, beam splitter to form two measurement channels X and Y manufactured in the form of beam splitting cube, for instance, and positioned behind source in beam path. Beam splitter fabricated in the form of plane-parallel splitting plate is placed simultaneously in two measurement channels to form and recombinate reference and information beams in each measurement channel. Flat reflector is made in the form of flat mirror and is set in path of information beam rigidly coupled to two-coordinate table and immobile reflector composed of plate with two plane-parallel specular-reflecting surfaces is installed in path of information beam. Precision of measurement increases thanks to exclusion of its nonorthogonality to working surfaces of immobile angle reflectors. EFFECT: increased precision of measurements, simplified design of interferometer. 2 dwg