METHOD OF INTERFERENCE MICROSCOPY Russian patent published in 2014 - IPC G01N21/55 

FIELD: measurement equipment.

SUBSTANCE: investigated microobject is illuminated by incoherent radiation, which is used for generation of an increased image of a microobject in the front focal plane of the 4f optical system, the radiation is divided with the help of a beam splitter, from two identical Dove prisms, glued along the bases of prisms, and both beams are sent to one flat mirror. The beam, which passed via both Dove prisms, is sent via a pin hole. After reverse passage via the beam splitter both beams of radiation are sent to an angle reflector, and the initial interference image is recorded, and then the beam splitter and angle reflector are displaced many times along the direction, which is perpendicular to the bases of the prisms. At the same time the phase of interference images changes in respect to the initial one, and a set of interference images is recorded, by which, using the method of phase steps, they calculate 2D distribution of optical difference of radiation travel that passed via the microobject.

EFFECT: reduced level of coherent noise, lower requirements to alignment of an interferometer, increased stability of measurement results, increased accuracy of measurements.

3 cl, 6 dwg