FIELD: mechanical engineering, instrumentation engineering. SUBSTANCE: device has a reactor, a substrate made with possible vertical displacement, a mask mounted under the reactor bottom transparent for the electromagnetic radiation and the source of electromagnetic radiation of the optical range of the wave lengths disposed under the mask. The mask consists of a set of plates transparent for radiation and having complex shaped portions non-transparent for radiation. The plates are equipped with drives for horizontal and vertical displacement. EFFECT: enhanced efficiency. 4 dwg
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