FIELD: mechanical engineering, instrumentation engineering. SUBSTANCE: device has a reactor, a substrate made with possible vertical displacement, a mask mounted under the reactor bottom transparent for electromagnetic radiation and the source of electromagnetic radiation of the optical range of the wave lengths disposed under the mask. The mask is made of two plane-parallel plates transparent for electromagnetic radiation and mounted for the vertical displacement one relative another. Between them the complex shaped members made of resilient material and non-transparent for electromagnetic radiation are disposed. EFFECT: enhanced efficiency. 1 dwg
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