APPARATUS FOR BEAM TREATMENT OF MATERIALS Russian patent published in 1995 - IPC

FIELD: electron beam or laser beam treatment of materials. SUBSTANCE: apparatus has the power unit 1 for generating a beam; the pickup 2 of secondary irradiation; the voltage source 3; the loading resistor 4; the comparator 5; the flip-flop 6; the pulse generator 8, having a control switch; two counters 9, 13; the digital-to-analog converter 10; the pulse shaper 11; the frequency divider 12; the decoder 14 and the indicator 15, connected by its input with an output of the decoder 14. The apparatus performs upon deposition process digital integration of a ionic current, whose integral value is proportional to a thickness of a coating, and also provides displaying of the results on the indicator 15. EFFECT: enhanced accuracy of checking a thickness of coatings upon beam deposition of metal by continuously acting beam due to independence of an accuracy degree of an integration process upon duration of the process itself. 1 cl, 1 dwg