FIELD: manufacturing of semiconductor devices. SUBSTANCE: carbon filler contains calcined coke. Quantity of fine fraction having size 0.03-0 mm is 25-40 mass quantity of 0.03-0.16 mm fraction is 15-30 mass quantity of coarse fraction is the rest. Density of articles is 1,84-1,94 g/cm3, compressive strength 320-890 kgf/cm2, their bending strength being 134-410 kgf/cm2. EFFECT: improves quality of desired product. 2 tbl
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Authors
Dates
1995-12-27—Published
1993-08-06—Filed