FIELD: manufacturing of semiconductor devices. SUBSTANCE: calcined coke ground to size (-2.0-0) mm is fed into mixer, its quantity being 60-65 of total amount. Then it is heated to 110 C, poured with melted pitch (its quantity being 90 of total pitch mass) and mixed. The process is followed by adding natural graphite (its quantity being 7-10 of total amount) and pitch residue. Specific resistance of articles which are manufactured of said mass is 8-90 8-9 m/mm2,, their compressive strength being 54-56 MPa. EFFECT: improves efficiency of method. 1 tbl
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