FIELD: measurement technology. SUBSTANCE: plasma diagnostics method using resonance-tuned impedance probe involves simultaneous application of sine-wave probing voltage of high modulation frequency and bias voltage in the form of low-frequency positive-going pulses to probe. Additional information about plasma parameters is obtained from low-frequency measuring signal shaped by probe current across capacitor of charge-discharge circuit. High- and low-resistance measurement ranges are continuously changed over. Device has probing-voltage generator, bias voltage generator, filter, resonance-tuned sensing element, double-electrode probe, amplifier, amplitude detector, secondary inductance coil. In addition, device is provided with two-range secondary inductance coil, source follower, electronic switch, synchronous peak detector. EFFECT: enlarged functional capabilities. 2 cl, 7 dwg
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