VAPOR-JET HIGH-VACUUM PUMP Russian patent published in 1996 - IPC

FIELD: vacuum engineering. SUBSTANCE: pump has shaped body with a steam-line, water boiler in lower part of the pump, and cooled screen in upper part of the pump inside the body. The screen follows the shape of internal surface of the body. Screen coolers are made in the form of thermal electric members or in the form of cryogenic panel. The coolers are installed in so manner, and screen thickness is chosen so to provide different temperature levels on screen panel. EFFECT: thermal adjustment. 1 dwg