FIELD: pump building. SUBSTANCE: pipeline of annular cross sections is placed in the body with inlet and outlet forevacuum chambers. Annular insertion piece with narrowing cross section is located on the internal body surface. Guide shell and pipeline are coaxial. Diaphragm is placed between the body and the shell below outlet nozzle. Diffusers of electron system are installed in the diaphragm. Nipples coaxial to the Diffusers are placed in the pipeline. EFFECT: forevacuum creation. 1 dwg
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0 |
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Authors
Dates
1995-12-20—Published
1991-05-16—Filed