FIELD: accelerators, generation of low-energy ion beams in ion sources. SUBSTANCE: method involves electron bombardment of atoms by accelerated electrons which power is greater than bonding power for electrons in atom. Both atoms and electrons run through interaction area multiple times due to reflection from interaction area borders and generation of reflected electrons and ions into beams. Corresponding device has cathode, anti-cathode and anode which is located between them. In addition device has reflecting electrodes which are located in symmetry and limit faces of discharge chamber, braking electrodes which are located between reflecting electrodes and between cathode and anti-cathode. Anti-cathode, cathode, reflecting electrodes and braking electrodes are designed as plates which holes pass ions and electrons. EFFECT: increased efficiency, multiple interaction of electrons and atoms. 3 cl, 1 dwg
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Authors
Dates
1996-10-27—Published
1994-03-16—Filed