MASS-SPECTROMETER ANALYSER OF GAS LEAK DETECTOR Russian patent published in 2015 - IPC H01J49/26 G01M3/00 

FIELD: instrumentation.

SUBSTANCE: invention relates to vacuum engineering, namely to static magnetic mass spectrometer analysers with 180-degree rotation and double magnetic focusing, and can be used in gas leak detectors, including the helium ones, intended for tightness test of various systems and objects allowing pumping from internal cavity down to deep vacuum or its filling with helium-containing mix or another test gas at overpressure. The mass spectrometer analyser of gas leak detector contains the vacuum chamber with connecting flanges inside which the following is contained: a source of ions of test gas substance consisting of a source of electrons and an ionisation chamber; a magnetic system providing mass separation of ions; ion receiver. Meanwhile the source of electrons is the plasma cathode based on the glow-discharge plasma that is the Penning cell placed in an axial magnetic field with the emitter of electrons implemented as a slot for formation of a tape electron beam in the cell anti-cathode from the ionisation chamber. It is preferable to provision in the central part of the Penning cell anode the holes for "pumping" of residual gas from the vacuum chamber.

EFFECT: improvement of reliability and increase of service life of the mass spectrometer analyser; smoothing of vacuum requirements.

8 cl, 4 dwg