FIELD: drying of protective polymeric coating produced by application of solution on piece surface, method and apparatus are used in electrical engineering and micro electronics. SUBSTANCE: excessive pressure sufficient to stop micro cracks process development in coating, that make coating properties worse, is created at stage of polymeric coating holding in range of temperatures of processing space. The pressure is maintained and at stage of coating cooling till it achieves temperature, under which in terms of atmospheric pressure process of coating micro cracks development, that makes coating protective properties worse, is stopped. Apparatus for coating drying has in series located and communicating to each other through hatches 4 and 15 chamber 1 for coating drying under temperature of processing space, high-temperature chamber 13 and cooling chamber 25. Chambers are made hermetically sealed and connected to main high pressure pipeline 8. EFFECT: method and apparatus allow to avoid polymeric coating micro cracks development. 3 cl, 3 dwg
Authors
Dates
1997-04-27—Published
1993-01-08—Filed