DEVICE FOR AUTOMATED PRECISION MONITORING OF SPECIFIC RESISTANCE Russian patent published in 1997 - IPC

FIELD: measurement technology; measurement of resistivity of layers (specimens) by probe method. SUBSTANCE: device has a programmable stable current source, programmable commutator, matrix probe head, analog-to-digital converter, digital-to-analog conversion unit, control unit, measurement results processor, unit of step drives, origin-of-coordinates catcher, probe pressure clamper and appropriate communications between the units. The processor has a unit for arranging a set of measurement results, a unit for calculating sets of resistivity values and anisotropy, a unit for arranging monitoring results, an information storage unit, a results displaying unit and appropriate communications between the units. EFFECT: higher accuracy, information content and resolution; facilitated automation of monitoring process. 1 dwg