SCANNING TUNNEL MICROSCOPE Russian patent published in 2007 - IPC H01J37/285 

FIELD: scanning tunnel spectrometry for obtaining layout of conducting surfaces and studying physical and engineering properties of solid bodies.

SUBSTANCE: proposed scanning tunnel microscope has detachable precision piezoelectric conductor for displacing metering point along X, Y, Z axes relative to specimen surface, step-by-step piezoelectric drive for approaching specimen to point, tunnel current measuring unit incorporating current-to-voltage converter, analog-to-digital converter, digital-to-analog converter, high-voltage tunnel-voltage amplifier, investigated surface layout recording unit with control computer, voltage ripples compensating unit, switching unit, high-voltage amplifier of voltage across Z axis, adaptive control unit incorporating digital-to-analog converter, adaptive specimen-to-point approaching unit, signal processor, two digital-to-analog converters, two high-voltage amplifiers, digital-to-analog converter for precision control of tunnel clearance, adder, low-pass filter, and temperature-compensating digital-to-analog converter.

EFFECT: enlarged functional capabilities, enhanced reliability of measurement results and measurement accuracy of device.

1 cl, 1 dwg