METHOD OF MANUFACTURING MICRODEVICES FROM PLASTICALLY DEFORMABLE MATERIALS Russian patent published in 1997 - IPC

FIELD: micromechanics. SUBSTANCE: invention concerns deformable materials, e.g. glass with cross-section up to 5 mcm. Method includes formation of stock from insoluble body, soluble shell, and electric wiring disposed inside the body. Then follow: caking of stock, stretching it such as to preserve geometrical similarity of cross-section outline, cutting stretched part into lumps, treatment of end surfaces of lumps to provide predetermined geometrical shape of microdevice, covering these surfaces with film coatings with functional layers which are connected with electric conductors in a specific manner thereby forming electric system of microdevice. Wiring system is formed as capillaries of a material plastically deformable together with stock. Capillaries can be partially or completely filled with current conducting material. EFFECT: improved manufacturing procedure. 4 cl, 9 dwg