OPTICAL ROUGHNESS INDICATOR Russian patent published in 1997 - IPC

FIELD: measurement technology. SUBSTANCE: designed optical roughness indicator realizes combination of advantages of optical devices using white light, namely, freedom from diffraction spatial noises (speckles) and of optical devices using interference-phase methods of measurement. This ensures achievement of needed technical result - increased measurement accuracy up to values not less than λ/1000. Another technical achievement consists in possibility of examination of surfaces having substantially larger dimensions that can be measured by other known roughness indicators as dimension of examined surface is limited only by particular realization of used matching unit. This enables developed optical roughness indicator to be used for contactless measurements in metrological support of subnanometric technologies. EFFECT: increased measurement accuracy, possibility of examination of surfaces of large linear dimensions of the order of one meter. 4 cl, 1 dwg