METHOD OF REMOTE CONTROL OF SURFACE SHAPE AND THICKNESS OF COATINGS PRODUCED IN PROCESS OF MAGNETRON VACUUM SPUTTERING, AND DEVICE FOR ITS REALISATION Russian patent published in 2015 - IPC G01B11/06 

FIELD: measurement equipment.

SUBSTANCE: invention relates to the field of precision optical means to control shape of object surfaces in process of their technological treatment or functioning. Recovery of absolute 3D profile of entire surface is carried out by series of data of relative measurements of interferogram phases. The process of measurement of interferogram phases is repeated during performance of mutual displacements and rotations of bundles of a double-beam phase-shifting interferometer relative to their initial direction. Thickness of the coating is determined by calculation of difference of absolute 3D profiles of surfaces: profile received before start of measurements (substrate without a coating) and subsequent profiles (substrate with an applied coating).

EFFECT: production of absolute 3D profile of surface (map of altitudes) and thickness of a coating applied onto a controlled surface, without usage of a reference surface from large distances with nanometre accuracy in process of technological treatment.

4 cl, 4 dwg