METHOD FOR MANUFACTURE OF WELDED ARTICLES FROM QUARTZ GLASS Russian patent published in 1997 - IPC

FIELD: manufacture of ultrapure welded articles from quartz glass used in electronic industry for manufacture of components of electronic equipment including superlarge-scale integral circuits. SUBSTANCE: method for manufacture of welded articles from glass, mainly, from quartz glass, consists in that welded parts in welding zone are made with allowance of at least 2 mm in direction square to their surface. Part surfaces subject to welding are prepared by mechanical fixation of mutual angular positions of parts and cutting off of allowances by laser radiation with provision of parallel position of joined surfaces. Parts are joined with preservation of their mutual angular position, and welded by laser radiation and subjected to subsequent annealing. EFFECT: excluded contamination of weld zone of articles, improved quality of articles, and reduced labor input for article manufacture. 2 dwg