FIELD: piezoelectronics, applicable in production of piezoelectric elements for RF piezoelectric resonators and monolithic filters. SUBSTANCE: RF piezoelectric element of the back-type mesa- structure is made of a single-crystal wafer in the form of a thinned central part with a thicker shoulder surrounding it; the shoulder is made with a rupture, whose width makes up 20 to 400 thickness of the thinned part of the piezoelectric element. EFFECT: improved design. 4 dwg
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Authors
Dates
1997-12-20—Published
1995-11-10—Filed