FIELD: piezoelectronics, applicable in production of piezoelectric elements for RF piezoelectric resonators and monolithic filters. SUBSTANCE: RF piezoelectric element of the back-type mesa- structure is made of a single-crystal wafer in the form of a thinned central part with a thicker shoulder surrounding it; the shoulder is made with a rupture, whose width makes up 20 to 400 thickness of the thinned part of the piezoelectric element. EFFECT: improved design. 4 dwg
Title | Year | Author | Number |
---|---|---|---|
HIGH-FREQUENCY PIEZOID | 2003 |
|
RU2234186C1 |
PIEZOID | 1992 |
|
RU2032252C1 |
MONOLITHIC QUARTZ FILTER | 2006 |
|
RU2329592C2 |
PIEZOELECTRIC CAVITY | 1992 |
|
RU2047267C1 |
MONOLITHIC FILTER PIEZOID | 1989 |
|
RU1685234C |
CRYSTAL RESONATOR MANUFACTURING PROCESS | 1999 |
|
RU2169986C2 |
PROCESS OF CREATING NANOVIBRATIONAL COATING FOR MEDICAL DEVICES WITH APPLICATION OF SEVERAL TYPES OF THIN PIEZOELEMENT FLUCTUATIONS | 2005 |
|
RU2419395C2 |
SURFACE ACOUSTIC WAVE FILTER | 2023 |
|
RU2817395C1 |
MIDGET HIGH-FREQUENCY FILTERING CRYSTAL RESONATOR OF IMPROVED SINGLE RESPONSE AND LOW SPREAD IN DYNAMIC CHARACTERISTICS | 2002 |
|
RU2232461C2 |
HIGH-FREQUENCY FILTER AT CUT CRYSTAL RESONATOR | 2008 |
|
RU2377718C1 |
Authors
Dates
1997-12-20—Published
1995-11-10—Filed