CRYSTAL RESONATOR MANUFACTURING PROCESS Russian patent published in 2001 - IPC

FIELD: piezoelectronics; high-frequency resonators and monolithic filters. SUBSTANCE: manufacture of BT-cut crystal resonators involves following operations: quartz crystal sawing into flat blanks, mechanical grinding of blanks, shaping of crystal elements mainly in the form of inverted mesa by deep chemical etching, deposition of electrodes, and wiring. Flat blank is positioned in sawing quartz crystal at angle of 0^o00′±30′ to X axis and -49^o±30′ to Z axis; crystal element of surface roughness not over 5•10^-8 m is shaped by chemical etching, and crystal element structure is inverted at angle of -49^o±30′ to Z axis by thermal treatment at temperature of α-β-α phase transition (846 K). Quantity produced BT-cut crystal resonators are designed for use within range extended to high and microwave frequencies. EFFECT: enlarged functional capabilities, facilitated manufacture. 3 dwg