COMBINED TURBOMOLECULAR PUMP Russian patent published in 1998 - IPC

FIELD: vacuum engineering; combined turbomolecular pumps. SUBSTANCE: combined turbomolecular pump includes housing, electric motor, rotor and gas-dynamic support. Outer surface of additional cylindrical sleeve performs function of viscosity stage; pressed in inner bore of sleeve is bush of gas-dynamic support which enhances service characteristics of pump and reduces its axial dimensions. One of rotor turbowheels having solid end performs the function of hermetic cover separating the volume being evacuated from gas support. EFFECT: improved service characteristics of pump and reduced axial dimensions. 1 dwg