TURBOMOLECULAR PUMP WITH SINGLE-FLOW TURBOMOLECULAR FLOW PART Russian patent published in 2013 - IPC F04D19/04 

FIELD: engines and pumps.

SUBSTANCE: flow part of a pump includes three stages: one turbomolecular stage and two molecular stages. Upper housing 1 is fixed on the end of projection of centre housing 2 concentrically to its outer surface. Inner surface of housing 1 is restricted on end faces with two internal grooves 15, 16 and includes multiturn screw grooves 17 with an angle of approach opposite rotation of rotor 6. Housing 2 is provided with external end flange 18 and includes through holes 19. Outer surface of cylindrical projection 13 of housing 2 includes multiturn screw grooves 20 with an angle of approach towards rotation of rotor 6. Upper part of rotor 6, which is made in the form of thick-wall cylinder 21 with milled blades 7 having an inclination angle towards rotation of rotor 6; outer diameter of cylinder 21 in upper part of rotor 6 exceeds outer diameter of hollow cylinder 26 in lower part of rotor 6. Upper part is arranged inside groove 16 of housing 1, thus forming the first turbomolecular stage of the flow part. Equidistant cylindrical sections that are concentrically located opposite each other between inner surface with grooves 17 of housing 1, walls of a hollow cylinder in lower part of rotor 6 and outer surface with grooves 20 of housing 2 form the second and the third molecular stages of the flow part.

EFFECT: development of a reliable high-efficiency turbomolecular pump having improved technical and operating characteristics.

7 cl, 3 dwg