FIELD: engines and pumps.
SUBSTANCE: invention relates to high-vacuum pumps. Proposed pump consists of housing motor running in bearings to drive the pump rotor with rotor vanes and stator vanes arranged between the latter to make a turbomolecular stage. Pump rotor inner part seat is shaped to Morse cone with four-start square thread with variable cross-section of thread root. Stator stationary pump part is separated from pump rotor by antifriction bush made of graphite-teflon material.
EFFECT: higher capacity, reliable and long-term operation.
4 cl, 2 dwg
Title | Year | Author | Number |
---|---|---|---|
TURBOMOLECULAR PUMP WITH SINGLE-FLOW TURBOMOLECULAR FLOW PART | 2012 |
|
RU2490519C1 |
TWO-FLOW TURBOMOLECULAR VACUUM PUMP WITH HYBRID AIR-GAS CHANNELS | 2014 |
|
RU2543917C1 |
SINGLE-FLOW FOUR-STAGE TURBOMOLECULAR PUMP | 2014 |
|
RU2560133C1 |
TURBOMOLECULAR VACUUM PUMP | 1991 |
|
RU2014510C1 |
VACUUM MOLECULAR PUMP | 0 |
|
SU1810604A1 |
VERTICAL PUMP | 1990 |
|
RU2005919C1 |
COMBINED TURBOMOLECULAR PUMP | 1995 |
|
RU2105905C1 |
COMPOSITE TURBOMOLECULAR VACUUM PUMP | 0 |
|
SU1776333A3 |
0 |
|
SU170609A1 | |
TURBOMOLECULAR VACUUM PUMP | 0 |
|
SU737660A1 |
Authors
Dates
2015-08-27—Published
2012-05-31—Filed