FIELD: ion engineering. SUBSTANCE: ion source has ionizing chamber with extraction aperture, plasma electrode, magnets producing peripheral organization, multiple magnetic field; cathodes are placed past magnetic poles relative to central longitudinal axis of source. EFFECT: provision for separating high-energy electrons from beam shaping zone; reduced temperature of ions in plasma wherefrom ion beam is extracted. 2 dwg
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Authors
Dates
1998-06-27—Published
1994-04-12—Filed