SOURCE OF IONS WITH MULTIPOLE MAGNETIC FIELD IN HOLLOW CATHODE Russian patent published in 2009 - IPC H01J3/04 

Abstract RU 2352013 C2

FIELD: physics.

SUBSTANCE: in source of ions with multipole magnetic field in hollow cathode consisting of anode with emission aperture, hollow non-incandescent cathode executed in the form of the hollow cylinder from antimagnetic material which vacuity has length major, than diameter, on an outer side of the lateral surface of this cylinder, on all its length, the magnets formativing a multipole magnetic field in its vacuity which quantity reaches maximum near to the lateral wall of the cylinder are mounted and comes nearer to zero on its central long axis.

EFFECT: reduction of working pressure of gas in radiant of ions and magnification of phase ion beam density at source output.

2 dwg

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RU 2 352 013 C2

Authors

Turchin Vladimir Ivanovich

Kondrat'Ev Boris Konstantinovich

Dates

2009-04-10Published

2007-02-22Filed