FIELD: instrument chemical analysis, analytical chemistry. SUBSTANCE: proposed method consists in selection of secondary electron emission metering exceeding in sensitivity to content of oxygen known methods in the capacity of measurement method. Comparison sample is prepared by short-time irradiation of local section in vacuum by electrons around which working zone with different content of oxygen is formed. Determination of oxygen concentration is conducted by comparison of intensities of emission from sample and from reference working zone calibrated in advance. EFFECT: increased accuracy and sensitivity of analysis of oxygen accompanied by saving of time, energy and material resources, simplified process of preparation of reference sample. 5 dwg
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