FIELD: measurement technology. SUBSTANCE: acceleration is converted into angular deviation of part relative to case. This deviation is converted into electric signal. Additional similar inertial part is introduced and its angular deviation from first inertial part as well as its linear deviation from case are converted into electric signal. Sensing element has two glass strips with fixed capacitor plates and respective current leads evaporated on them. Silicon inertial part is placed between glass strips and has supporting member and moving capacitor strip connected to supporting member by means of flexible jumpers and current leads. Moving capacitor strip is divided into two parts with through slits between them intercoupled through flexible jumpers and current leads. Gravity centers of strip parts coincide in initial state; masses m1 and m2 of strip parts and stiffness factors K1 and K2 of their flexible jumpers meet equation (m1+m2)l1/m2l2 = K1/K2, where l1 and l2 are distances from center of masses to points of fixation of respective parts of strip. EFFECT: improved sensitivity in conversion of sensing mass deviation to electric signal. 2 cl, 2 dwg
