FIELD: gas-discharge equipment. SUBSTANCE: method involves preceding heat processing under exhausting temperature of 330-400 C with heat processing under 150-400 C and coating cover with gas discharge in noble gas with pumping operations, which are performed after or during processing. EFFECT: decreased discharge excitation voltage due to increased quality of purification.
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Authors
Dates
1999-06-27—Published
1998-07-02—Filed