FIELD: measurement technology; temperature sensors sending DC current and voltage signals. SUBSTANCE: transducer has single- crystalline sapphire substrate carrying thermistor of single- crystalline silicon layer. Other side of sapphire substrate is connected to titanium alloy base. Heat-independent resistor is connected in parallel with thermistor and installed on same surface of sapphire substrate. With adequately chosen concentration of current carriers in single-crystalline silicon thermistor and resistance value of heat-independent resistor, high-accuracy linearization of transducer performance characteristic is ensured within comprehensive temperature range of -200 to +500 C. EFFECT: improved accuracy and calibration characteristic linearity of transducer. 3 cl, 4 dwg
Title | Year | Author | Number |
---|---|---|---|
DEVICE MEASURING FORCE | 1997 |
|
RU2114406C1 |
THIN-FILM RESISTANCE THERMOMETER | 1996 |
|
RU2125717C1 |
SEMICONDUCTOR STRAIN-GAGE TRANSDUCER | 2005 |
|
RU2284074C1 |
ROTATING FLOW RATE CONVERTER | 1998 |
|
RU2149360C1 |
ELECTRICAL BRIDGE | 2000 |
|
RU2171473C1 |
LIQUID FLOW RATE CONVERTER | 2000 |
|
RU2178870C2 |
SINGLE-JET WATER METER | 1998 |
|
RU2146040C1 |
JET-TYPE AUTOMATICALLY GENERATING FLOWMETER-COUNTER | 1999 |
|
RU2175436C2 |
PROCESS DETERMINING PROFILE OF FLOW RATE OF LIQUID IN SECTION OF PIPE-LINE | 1997 |
|
RU2142642C1 |
SEMICONDUCTOR STRAIN-GAUGE TRANSDUCER | 0 |
|
SU934258A1 |
Authors
Dates
2000-01-27—Published
1998-08-06—Filed