FIELD: analytic instruments, in particular, for gas analysis. SUBSTANCE: both measuring and comparison chambers are split into three volumes using two types of screens. Middle volume is buffer (intermediate chamber) between active exchange volume and volume for direct converting of heat conductance into electric signal. EFFECT: increased sensitivity, stability to noise and increased precision of measurements, keeping stability of electric signal upon vacuum operations and measurement of low impurity concentration. 5 cl, 1 dwg
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Authors
Dates
2000-05-27—Published
1998-06-22—Filed