INTERFERENCE METHOD FOR MEASUREMENTS OF RELATIVE MOVEMENTS OF DIFFUSELY REFLECTING OBJECTS Russian patent published in 2000 - IPC

FIELD: measuring equipment. SUBSTANCE: first the sections of diffusely reflecting objects are illuminated. Then, one, two or three reflection angles of scattered radiation not coinciding with the illumination angle are selected. Then, the bundles of rays reflected at the same angles are brought into coincidence for formation of interference bands in the region of overlap of speckles. Relative movement of illuminated sections are determined according to the shift of the interference bands. This method provides for determination of various components of the vector of relative movements of two bodies and various components of the vector of elastic deformations on the surface and within the diffusely reflecting object with controllable sensitivity. EFFECT: facilitated procedure. 2 dwg