METHOD OF INTERFERENCE MEASUREMENTS IN DIFFUSE-COHERENT RADIATION Russian patent published in 2000 - IPC

FIELD: measurement technology. SUBSTANCE: method may be used for determination of displacements directed perpendicularly to direction of lighting and for determination of changes in reference index of phase objects. Method includes illumination of object under test coherent radiation. Two beams of coherent radiation are combined while one of them is the object beam. Method also includes checking of interference band variation within spectra in combined beams. Variations occurring in object under test are determined by variation of bands. Other object beam reflected from object under test at an angle different from that of reflection of the first object beam is used as the second interfering beam. EFFECT: enhanced measurement sensitivity. 3 dwg