LENS FOR CONTROLLING RADIATION IN THE FORM OF NEUTRAL OR CHARGED PARTICLES; METHOD FOR MANUFACTURING THESE LENSES; ANALYTICAL APPARATUS, BEAM THERAPY APPARATUS, CONTACT AND PROJECTION LITHOGRAPHY DEVICES USING THESE LENSES Russian patent published in 2001 - IPC

Abstract RU 2164361 C1

FIELD: flaw detection and diagnostics in engineering industries and medicine. SUBSTANCE: lens is, essentially, assembly of sublenses having different degree of integration. Sublens having least degree of integration is, essentially, assembly of beam transport channels formed as a result of joint extraction and molding of bundled capillary tubes at gas medium pressure in space between them below pressure inside capillary channels and at temperature high enough for softening material and for fusing adjacent capillary tubes. Sublens of every higher degree of integration is assembly of sublenses of preceding degree of integration resulting from their joint extraction and molding at gas medium pressure in space between them lower than pressure inside sublens channels and at temperature high enough for softening material and for fusing adjacent sublenses. All sublenses having highest degree of integration are assembled into single structure resulting from their joint extraction and molding at gas medium pressure in space between them lower than pressure in sublens channels and at temperature high enough for melting material and for fusing adjacent sublenses. Ends of this single structure are trimmed and form input and output faces of lens. For manufacturing this lens bundle of blanks in the form of capillary tubes (for example, glass ones) or blanks produced in preceding stage of process are vertically inserted in furnace and products are extracted furnace at rate higher than feed rate. Product is cut into blanks for next stage and for final procedure they are molded by varying rate of extraction; then sections with barrel-shaped bulges are separated. EFFECT: improved beam focusing by lens, higher energy of particles used, improved characteristics of devices using these lenses. 40 cl, 30 dwg

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RU 2 164 361 C1

Authors

Kumakhov M.A.

Dates

2001-03-20Published

1999-10-18Filed