FIELD: measurement technology. SUBSTANCE: complex designed to conduct investigations in X-radiation range simultaneously in several analytical plants has source of diverging X-radiation, channels to convey radiation to analytical plants and equipment of these plants meant for spectrometric and diffractometric studies, for generation of images of internal structures of objects, for X-ray lithography. Radiation is conveyed to plants in quasiparallel beams formed by X-ray semi- lenses which present collection of bent channels with use of multiple total external refection of X-radiation from their walls. Each semi-lens catches part of diverging radiation of X-ray source. X-ray tube is preferable type of source. Radiation beams directed to several analytical plants can be also generated with the aid of semi-lens common for these plants which output beam is split into several beams with the help of monochromators installed in path of initial beam at angle with direction of its propagation. Each of them intercepts part of cross-section of initial beam. In specific case complex can have complete X-ray lens focusing radiation of source in region located across input to one of analytical plants. EFFECT: high brightness of radiation in input aperture of analytical plant with use of inexpensive sources. 27 cl, 10 dwg
