FACILITY TESTING PRECISION OF REGISTRATION OF MARK WITH FOCAL PLANE OF OBJECTIVE LENS Russian patent published in 2001 - IPC

Abstract RU 2172973 C1

FIELD: instrumentation. SUBSTANCE: invention refers to equipment testing precision of registration of mark with focal plane of objective lens of predominantly large-sized collimators. Facility has optically mated analyzer of parallelism of rays of light beam and telescope. Analyzer of parallelism of light beam comes in the form of optical unit incorporating two parallel channels. First diaphragm, deviating aid with measurement mechanism, compensator of errors in direction of light beams and beam splitting plate making angle of 45 degrees with axis of first channel are arranged in series on axis of first channel. Second diaphragm, beam splitter and flat mirror parallel to beam splitting plate and made fast to it are arranged is series on axis of second channel. Distance between centers of first and second diaphragms is equal to distance between flat mirror and beam splitting plate along axis of second channel. Beam splitter is manufactured in the form of two wedge-shaped plates with their main sections parallel to plane including axes of first and second channels and their vertexes diametrically opposite. In this case boundary of separation of wedge-shaped plates is located on axis of second channel. EFFECT: facility can be used as multipurpose high-precision device for timely test of precision of registration of mark with focal plane of objective lens of predominantly large-sized collimator both under laboratory and shop conditions. 3 dwg

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RU 2 172 973 C1

Authors

Tareev Anatolij Mikhajlovich

Dates

2001-08-27Published

2000-05-15Filed