GASEOUS NITROGEN TRIFLUORIDE PURIFICATION METHOD Russian patent published in 2003 - IPC

Abstract RU 2206499 C1

FIELD: chemical engineering. SUBSTANCE: gaseous nitrogen trifluoride is freed of carbon tetrachloride impurities via selective adsorption of the former by dehydrated erionite at temperature between -30 and 30 C followed by displacement of carbon tetrachloride with inert gas, desorption and condensation of thus purified nitrogen trifluoride. Purity of product is 99.99% and content of CF₄ is no higher than 10 ppm. EFFECT: enhanced economical efficiency and achieved easy industrial realization. 2 cl, 1 tbl, 4 ex

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RU 2 206 499 C1

Authors

Igumnov S.M.

Kharitonov V.P.

Dates

2003-06-20—Published

2002-02-26—Filed