METHOD OF OBTAINING NITROGEN TRIFLUORIDE Russian patent published in 2002 - IPC

FIELD: inorganic chemistry; method of obtaining nitrogen trifluoride. SUBSTANCE: nitrogen trifluoride is used chemical industry as fluorinating agent and as oxidant for fuel. In electronic industry, it is used as gas in dry etching processes which leaves no sediment; it is also used in vapor-phase settling chemical apparatus. Proposed method consists in fluorination of ammonium polyfluoride salt NH₄F•xHF, where "x" is more than 0-1.3 and may be equal to 1.3; starting salt is used in mixture with sorbent sorbing hydrogen fluoride formed in the course of synthesis; sorbent is just fluoride of metals MeF, where Me is metal of group I of periodic Table, preferably NaF, KF and LF. RbF and CsF may be also used because there is little point in using it from the economical standpoint. Process of obtaining nitrogen trifluoride is performed at temperature of from 20 to 125 C. EFFECT: simplification of process; complete use of starting salt NH₄F•xHF; possibility of withdrawing hydrogen fluoride at simultaneous removal of heat. 5 cl, 1 dwg, 1 tbl, 1 ex